semiconductor verification

SAT

Scanning Acoustic Tomography (SAT)

Scanning Acoustic Tomography(SAT) generates different signals through reflection, penetration, dispersion, material changes and defects, and then comes into various inspection images for analysis. SAT applies a variety of frequency probes for executing non-destructive testing of various samples. It can inspect the internal structure of the IC and check various defects (cracks, delaminations, impurities, adhesive material, voids, holes and grain boundary ) inside of the IC by multi-layer scanning inspection and inspect IC characterization and measure material properties.

Application Scenario

  • Non-destructive, non-destructive detection of internal structures
  • Layered scanning, multi-layer scanning
  • Check various defects (cracks, delaminations, impurities, adhesive material, voids, holes and grain boundary )
  • IC characterization and measure material properties

​Equipment Capacity

Case Study


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