FEI-IET FIB機台提供Knights-Camelot軟體進行CAD/GDS定位,可解決CSP backside施作瓶頸,適合各種封裝體以及8吋wafer。
FEI Vectra-IET FIB Specification
Ion Column: Visionary, Ga liquid metal
Acc. Voltage: 5kV – 50 kV
Beam Current: 1.0 pA – 15.0 nA
Image Resolution: 5nm
Stage: 2-axes 8″ Laser interferometer stage
X, Y motion 200 mm
Image Rotation 360
End Point Detection
Stage current end-pointing
Gas assisted Etching ( Chlorine, Xenon, Water )
Deposition ( Tungsten )
Insulator deposition ( Siloxane/TMTCS, Oxygen )
Cooper Removal ( CoppeRX )
GDS Navigation