semiconductor verification

Scanning Electron Microscope (SEM)

Scanning Electron Microscope (SEM) & EDS

The surface of the sample is scanned by electron beam with Scanning Electron Microscopy (SEM) & EDS. As the electron beam is accelerated, it will stimulate secondary electron, backscattered electron, and characteristic X-ray to be imaging with collecting secondary electron or backscattered electron. X-ray can be used for component analysis.

Application Scenario

  • Observe the sample surface.
  • VC (Voltage contrast), find anomalies with light and dark contrast
  •  EDS for qualitative and semi-quantitative component analysis

​Equipment Capacity

Case Study


Customer Service

TEL:03-6669700 ext. 6272,6274

Mail:fa@vesp-tech.com


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