semiconductor verification

Thermal EMMI

Hot spot detection- Thermal EMMI (Thermal EMMI)

Thermal EMMI is equipped with a high-sensitivity InSb camera to detect the distribution of thermal radiation by applying a voltage and using Lock in to locate the failure position. It also uses the phase diagram obtained from the thermal propagation characteristics (Phase) to estimate the relative position of the Z axis.

 Application Scenario


1.IC packaging and IC internal short-circuit analysis.

2.Low impedance analysis (<10 ohm).

3. Non-destructive testing (IC can be opened without cover).

4. PCB / module metal circuit defects.

5.TFT-LCD leakage / organic EL leakage positioning.

6. Observation of abnormal heat generation inside the device during the development of a new process.


​Equipment Capacity

Case Study

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